![]() Currently, test systems developed for MEMS devices have to be customized due to their nondeterministic behavior and complexity. Therefore, testing of these systems at device level as well as at mass production level, that is, parallel testing, is becoming very challenging as compared to the IC test, because MEMS respond to electrical, physical, chemical, and optical stimuli. Their failure modes are distinctive under different circumstances. MEMS devices are more complex and extremely diverse due to the immersion of multidomains. 239000000463 material Substances 0.The present review provides information relevant to issues and challenges in MEMS testing techniques that are implemented to analyze the microelectromechanical systems (MEMS) behavior for specific application and operating conditions.238000000926 separation method Methods 0.000 description 3.229910010293 ceramic material Inorganic materials 0.000 description 4.230000005540 biological transmission Effects 0.000 claims description 26.238000005859 coupling reaction Methods 0.000 claims abstract description 30. ![]() 238000010168 coupling process Methods 0.000 claims abstract description 30.230000001808 coupling Effects 0.000 claims abstract description 30.239000000919 ceramic Substances 0.000 title claims description 21.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority to US31862101P priority Critical Priority to US318621P priority Priority to US10/026,453 priority patent/US6812808B2/en Priority to US26453 priority Application filed by Radio Frequency Systems Inc filed Critical Radio Frequency Systems Inc Publication of EP1294043A2 publication Critical patent/EP1294043A2/en Publication of EP1294043A3 publication Critical patent/EP1294043A3/en Status Withdrawn legal-status Critical Current Links Original Assignee Radio Frequency Systems Inc Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Kulaga Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Withdrawn Application number EP02292219A Other languages German ( de) Google Patents Aperture coupled output network for ceramic resonator and cavity resonator combiner networkÄownload PDF Info Publication number EP1294043A2 EP1294043A2 EP02292219A EP02292219A EP1294043A2 EP 1294043 A2 EP1294043 A2 EP 1294043A2 EP 02292219 A EP02292219 A EP 02292219A EP 02292219 A EP02292219 A EP 02292219A EP 1294043 A2 EP1294043 A2 EP 1294043A2 Authority EP European Patent Office Prior art keywords combiner cavity resonators junction resonator Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents EP1294043A2 - Aperture coupled output network for ceramic resonator and cavity resonator combiner network EP1294043A2 - Aperture coupled output network for ceramic resonator and cavity resonator combiner network
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